Energetic Au ion beam implantation of ZnO nanopillars for optical response modulation

Abstract Nanopillars of ZnO were implanted with Au-400 keV ions at various ion fluences from 1 × 10 15 cm −2 to 16 and subsequently annealed 750 °C for min in order reduce the implantation damage support Au nanoparticle (NP) aggregation. It was found that implantation-induced effects thermal influence NP coalescence as well quality nanopillars. Rutherford Back-Scattering spectrometry (RBS) showed broader Au-depth profiles than it theoretically predicted, but Au-concentration maximum agrees prediction taking into account effective layer density. The higher induced morphology modification nanopillar evidenced by RBS scanning electron microscopy (SEM). An indirect evidence this effect given optical ellipsometry due gradual refractive index changes nanopillars increased Au-ion fluence. Optical characterization Au-implanted performed means photoluminescence (PL) diffuse-reflectance spectroscopy (DRS) surface plasmon resonance (SPR) activity embedded NPs. SPR-enhanced scattering PL emission observed spectral range 500–650 nm are ascribed NPs or more complex Au-clusters. In addition, measurements extinction coefficient corroborate results DRS, both indicating increase SPR fluence after post-annealing.